Parameter | Specification |
Material | Glass, quartz, etc. |
Shape | Round |
Outer diameter | 3”——12” |
Outer diameter size | 76.2mm——300mm |
Outer diameter tolerance | ±0.05mm |
Thickness | 0.1mm——2.0mm |
Minimum thickness | 0.1mm |
TTV | <3μm |
BOW | <20μm |
WARP | <30μm |
Appearance quality | 20/10 |
Roughness | Ra<5nm |
Inverted edge | 45°,C0.2+/-0.1mm |
* Remarks: Can be customized according to customer needs |